How to minimize self influence on revising own's salary or whole compensations structure?

If I understand your question right, then I suppose you are asking on how we can minimize the personal bias while conducting salary revision for group. My suggestions are as follows

1) Have a strong methodology/criteria set for the revision. This criteria should influence the decision on the revision scale and scope

2) Organization set up- The revision exercise should be based on facts and figure. This helps minimizing bias as the decision is based on numerical reasoning. Whats also important is the decision making body's exclusion from the exercise